Plasma assisted growth of nanotubes and nanowires

Surface and Coatings Technology

Volumn 201, Issue 22-23 SPEC. ISS., 2007, Pages 9215-9220

  Griffiths, H ^a   Xu, C ^a   Barrass, T ^a   Cooke, M ^a   Iacopi, F ^b   Vereecken, P ^b   Esconjauregui, S ^b  

^a OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

^b IMEC   (Belgium)

Author keywords

Carbon nanotubes; PECVD; Silicon nanowires

Indexed keywords

CATALYSTS; METALLIC FILMS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NANOWIRES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE;

SILICON NANOWIRES; THERMAL PRE-TREATMENT; THIN METAL FILM;

CARBON NANOTUBES;

CARBON NANOTUBES; CATALYSTS; METALLIC FILMS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; NANOWIRES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE;

EID: 34547669250     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.04.067     Document Type: Article

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