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Volumn 11, Issue 3-6, 2002, Pages 918-921
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Low temperature plasma chemical vapour deposition of carbon nanotubes
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Author keywords
Carbon; Chemical vapour deposition; Plasma; Spectroscopy
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Indexed keywords
ALUMINA;
ARGON;
CATALYSTS;
HYDROGEN;
IRON COMPOUNDS;
LOW TEMPERATURE EFFECTS;
METHANE;
MICROWAVES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
SUBSTRATE HEATING;
CARBON NANOTUBES;
PLASMA TREATMENT;
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EID: 0036508081
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00725-7 Document Type: Article |
Times cited : (17)
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References (10)
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