Influence of atomic hydrogen on transparent conducting oxide during hydrogenated microcrystalline Si preparation by PECVD

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 28, Issue 7, 2007, Pages 1005-1008

  Chen, Yongsheng ^a,b   Wang, Jianhua ^c   Lu, Jingxiao ^a   Yang, Gen ^a   Gao, Xiaoyong ^a   Yang, Shi'e ^a  

^a ZHENGZHOU UNIVERSITY   (China)

^b INSTITUTE OF PLASMA PHYSICS   (China)

^c WUHAN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Hydrogen plasma degradation; Hydrogenated microcrystalline silicon; TCO

Indexed keywords

DEGRADATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLAR CELLS;

HYDROGEN PLASMA DEGRADATION; HYDROGENATED MICROCRYSTALLINE SILICON; TRANSPARENT CONDUCTION OXIDES (TCO);

MICROCRYSTALLINE SILICON;

EID: 34547639024     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Droz C, Vallat-Sauvain E, Bailat J, et al. Relationship between Raman crystallinity and open-circuit voltage in mi-crocrystalline silicon solar cells. Sol Energy Mater Sol Cells, 2004, 81: 61.
2. Das R, Jana T, Ray S. Degradation studies of transparent conducting oxide: a substrate for microcrystalline silicon thin film solar cells. Sol Energy Mater Sol Cells, 2005, 86: 207.
3. Masuda A, Imamori K, Matsumura H. Influence of atomic hydrogen on transparent conducting oxides during hydro-genated amorphous and microcrystalline Si preparation by catalytic chemical vapor deposition. Thin Solid Film, 2002, 411: 166.
4. + ions. Thin Solid Films, 2005, 492: 236.
5. Das R, Jana T, Ray S. Degradation studies of transparent conducting oxide: a substrate for microcrystalline silicon thin film solar cells. Sol Energy Mater Sol Cells, 2005, 86: 207.