Characterization of SiNx/a-Si:H crystalline silicon surface passivation under UV light exposure

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7625-7628

  Tucci, M ^a   Serenelli, L ^a   De Iuliis, S ^a   Izzi, M ^a  

^a ENEA C R CASACCIA   (Italy)

Author keywords

Amorphous material; Dielectric properties; Silicon nitride

Indexed keywords

DIELECTRIC PROPERTIES; HYDROGENATION; PASSIVATION; SILICON NITRIDE; SUBSTRATES; ULTRAVIOLET RADIATION;

AMORPHOUS MATERIAL; GAS MIXTURE;

SOLAR CELLS;

EID: 34547629266     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.107     Document Type: Article

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