Influence of interface roughness on quantum transport in nanoscale FinFET

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1437-1440

  Khan, H ^a   Mamaluy, D ^a   Vasileska, D ^a  

^a AZ 85281   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT BLOCK REDUCTION METHOD; INTERFACE ROUGHNESS; NANOSCALE FINFET; QUANTUM TRANSPORT;

COMPUTER SIMULATION; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; QUANTUM THEORY; RANDOM PROCESSES;

FIELD EFFECT TRANSISTORS;

EID: 34547588283     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2748414     Document Type: Article

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