Proton exchange and diffusion in LiNb O3 using inductance coupled high density plasma

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1161-1165

  Ren, Z ^a   Heard, P J ^a   Yu, S ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; INDUCTANCE; INDUCTIVELY COUPLED PLASMA; ION EXCHANGE; PROTONS; SECONDARY ION MASS SPECTROMETRY;

ION DENSITY; PROTON DENSITY LAYERS; PROTON EXCHANGE EFFICIENCY;

LITHIUM COMPOUNDS;

EID: 34547580857     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2746052     Document Type: Article

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