Hybrid laser micro/nanofabrication of phase change materials with combination of chemical processing

Journal of Materials Processing Technology

Volumn 192-193, Issue , 2007, Pages 340-345

  Lin, Y ^a,b   Hong, M H ^a,b   Chen, G X ^a   Lim, C S ^a   Tan, L S ^a   Wang, Z B ^b   Shi, L P ^b   Chong, T C ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Alkaline solution etching; Electrical force microscopy; Near field scanning optical microscopy; Phase change material

Indexed keywords

ANNEALING; CHARACTERIZATION; COMPACT DISKS; DEPOSITION; ETCHING; LASER BEAM EFFECTS; NANOTECHNOLOGY; OPTICAL MICROSCOPY; RANDOM ACCESS STORAGE; WAVELENGTH; CHEMICAL INDUSTRY; CRYSTALLINE MATERIALS; ELECTRIC PROPERTIES; GERMANIUM; NANOSTRUCTURES; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL DATA STORAGE; OPTICAL PROPERTIES; PHASE CHANGE MATERIALS;

ALKALINE SOLUTION ETCHING; CHEMICAL PROCESSING; ELECTRICAL FORCE MICROSCOPY; NEAR-FIELD SCANNING OPTICAL MICROSCOPY; PHASE CHANGE MATERIAL;

OPTICAL DATA STORAGE; AMORPHOUS FILMS;

ALKALINE SOLUTIONS; DEPOSITION TECHNIQUE; DIGITAL VERSATILE DISKS; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL FORCE; OPTICAL DATA STORAGE SYSTEMS; RANDOM ACCESS MEMORY; THREE-DIMENSIONAL STRUCTURE;

EID: 34547501942     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.04.089     Document Type: Article

References (22)

1. Broers A.N., Harper J.M., and Molzen W.W. 250-Å linewidths with PMMA electron resist. Appl. Phys. Lett. 33 (1978) 392-394
2. Flanders D. Replication of 175-Å lines and spaces in polymethylmethacrylate using X-ray lithography. Appl. Phys. Lett. 36 (1980) 93-96
3. McCord M.A., and Pease R.F.P. Lithography with the scanning tunneling microscope. J. Vac. Sci. Technol. B 4 (1986) 86-88
4. Albrecht T.R., Dovek M.M., Lang C.A., Grüter P., Quate C.F., Kuan S.W.J., Frank C.W., and Pease R.F.P. Imaging and modification of polymers by scanning tunneling and atomic force microscopy. J. Appl. Phys. 64 (1988) 1178-1184
5. Early K., Schattenburg M.L., and Smith H.I. Absence of resolution degradation in X-ray lithography for λ from 4.5 nm to 0.83 nm. Microelectron. Eng. 11 (1990) 317-321
6. Lyding J.W., Shen T.C., Hubacek J.S., Tucker J.R., and Abelin G.C. Nanoscale patterning and oxidation of H-passivated Si(1 0 0)-2 × 1 surfaces with an ultrahigh vacuum scanning tunneling microscope. Appl. Phys. Lett. 64 (1994) 2010-2012
7. Chou S.Y., Krauss P.R., and Renstrom P.J. Imprint of sub-25 nm vias and trenches in polymers. Appl. Phys. Lett. 67 (1995) 3114-3116
8. Wu M.H., Paul K.E., and Whitesides G.M. Patterning flood illumination with microlens arrays. Appl. Opt. 41 (2002) 2575-2585
9. Kato J., Takeyasu N., Adachi Y., Sun H.B., and Kawata S. Multiple-spot parallel processing for laser micronanofabrication. Appl. Phys. Lett. 86 (2005) 044102
10. Talbot H.F. Phil. Mag. 9 (1836) 401-407
11. Besold B., and Lindlein N. Practical limitations of talbot imaging with microlens arrays. Pure Appl. Opt. 6 (1997) 691-698
12. Lin Y., Hong M.H., Chen G.X., Lim C.S., Wang Z.B., Tan L.S., Shi L.P., and Chong T.C. Microlens array patterning on phase change film. Proceedings of the 1st International Symposium on Functional Materials 2005. Kuala Lumpur, Malaysia (2005) 737-746
13. Kasparian J., Sauerbery R., Mondelain D., Niedermeier S., Yu J., Wolf J.-P., André Y.-B., Franco M., Prade B., Tzortzakis S., Mysyrowicz A., Rodriguez M., Wille H., and Wöste L. Infrared extension of the super continuum generated by femtosecond terawatt laser pulses propagating in the atmosphere. Opt. Lett. 25 (2000) 1397-1399
14. Aközbek N., Iwasaki A., Becker A., Scalora M., Chin S.L., and Bowden C.M. Third-harmonic generation and self-channeling in air using high-power femtosecond laser pulses. Phys. Rev. Lett. 89 (2002) 143901
15. Yang H., Zhang J., Zhao L.Z., Li Y.J., Teng H., Li Y.T., Wang Z.H., Chen Z.L., Wei Z.Y., Ma J.X., Yu W., and Sheng Z.M. Third-order harmonic generation by self-guided femtosecond pulses in air. Phys. Rev. E 67 (2003) 015401
16. Hao Z.Q., Zhang J., Zhang Z., Xi T.T., Zheng Z.Y., Yuan X.H., and Wang Z.H. Third harmonic generation in plasma channels in air induced by intense femtosecond laser pulses. Acta Phys. Sin. 54 (2005) 3173-3177
17. Schillinger H., and Sauerbrey R. Electrical conductivity of long plasma channels in air generated by self-guided femtosecond laser pulses. Appl. Phys. B 68 (1999) 753-756
18. Tzortzakis S., Franco M.A., André Y.-B., Chiron A., Lamouroux B., Prade B.S., and Mysyrowicz A. Formation of a conducting channel in air by self-guided femtosecond laser pulses. Phys. Rev. E 60 (1999) R3505-R3507
19. Lin Y., Hong M.H., Wang W.J., Law Y.Z., and Chong T.C. Sub-30 nm lithography with near-field scanning optical microscope. Appl. Phys. A 80 (2005) 461-465
20. Lin Y., Hong M.H., Lim C.S., Chen G.X., Tan L.S., Wang Z.B., Shi L.P., and Chong T.C. Ultrafast laser induced parallel phase change nanolithography. Appl. Phys. Lett. 89 (2006) 041108
21. Waser R. Nanoelectronics and Information Technology: Advanced Electronic Materials and Novel Devices (2002), Wiley-VCH, Cambridge, Weinheim
22. 3 pseudobinary amorphous thin films for an optical disk memory. J. Appl. Phys. 69 (1991) 2849-2855