Fabrication process for RSFQ/qubit systems

IEEE Transactions on Applied Superconductivity

Volumn 17, Issue 2, 2007, Pages 952-954

  Grönberg, Leif ^a   Hassel, Juha ^a   Helistö, Panu ^a   Ylilammi, M ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Fabrication; Niobium; Qubit; RSFQ

Indexed keywords

ALUMINUM; CRITICAL CURRENT DENSITY (SUPERCONDUCTIVITY); NIOBIUM; THERMAL EFFECTS;

QUBIT OPERATION; QUBIT SYSTEMS;

NETWORKS (CIRCUITS);

EID: 34547413493     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2007.897721     Document Type: Conference Paper

References (17)

1. K. K. Likharev and V. K. Semenov, "RSFQ logic/memory family: A new Josephson-junction technology for sub-terahertz-clock-frequency digital system," IEEE Trans. Appl. Supercond., vol. 1, no. 1, pp. 3-28, Mar. 1991.
2. V. K. Semenov and D. V. Averin, "SFQ control circuits for Josephson junction qubits," IEEE Trans. Appl. Supercond., vol. 13, no. 2, pp. 960-965, Jun. 2003.
3. 2 Fabrication Processes, vol. 15, no. 2, pp. 90-93, Jun. 2005.
4. S. Nagasawa, K. Hinode, M. Sugita, T. Satoh, H. Akaike, Y. Kitagawa, and M. Hidaka, "Planarized multi-layer fabrication technology for LTS large-scale SFQ circuits," Supercond. Sci. Technol., vol. 16, no. 12, pp. 1483-1486, Nov. 2003.
5. F. C. Wellstood, C. Urbina, and J. Clarke, "Hot-electron effects in metals," Phys. Rev. B, vol. 49, no. 1, pp. 5942-5955, Mar. 1994.
6. A. M. Savin, J. P. Pekola, D. V. Averin, and V. K. Semenov, "Thermal budget of superconducting digital circuits," J. Appl. Phys., vol. 99, no. 8, p. 084501, Apr. 2006.
7. M. G. Castellano, L. Grönberg, P. Carelli, F. Chiarello, C. Cosmelli, R. Leoni, S. Poletto, G. Torrioli, J. Hassel, and P. Helistö, "Characterization of a fabrication process for the integration of superconducting qubits and rapid-single-flux-quantum circuits," Supercond. Sci. Technol., vol. 19, no. 8, pp. 860-864, Jul. 2006.
8. A. M. Savin, J. P. Pekola, T. Holmqvist, J. Hassel, L. Grönberg, P. Helistö, and A. Kidiaryova-Shevchenko, "High resolution superconducting single flux quantum comparator for sub Kelvin temperatures," Appl Phys. Lett., vol. 89, no. 13, p. 133505, Sep. 2006.
9. ∞/Nb Josephson junctions," in Proc. 4th International Conference SQUID'91, Berlin, Jun. 18-21, 1991, pp. 281-285.
10. H. Seppä, M. Kiviranta, A. Satrapinski, L. Grönberg, J. Salmi, and I. Suni, "A coupled DC SQUID with low 1/f noise," IEEE Trans. Appl. Supercond., vol. 3, no. 1, pp. 1816-1819, Mar. 1993.
11. H. Seppä, M. Kiviranta, and L. Grönberg, "DC SQUID based on un-shunted Josephson junctions: Experimental results," IEEE Trans. Appl. Supercond., vol. 5, no. 2, pp. 3248-3251, Jun. 1995.
12. J. Hassel, H. Seppä, L. Grönberg, and I. Suni, "Optimization of a Josephson voltage array based on frequency dependency damped superconductor-insulator-superconductor junctions," Rev. Sci. Instrum., vol. 74, no. 7, pp. 3510-3515, Jul. 2003.
13. M. Kiviranta, S. Penttilä, L. Grönberg, J. Hassel, A. Virtanen, and H. Seppä, Supercond. Sci. Technol., vol. 17, no. 5, pp. 285-289, Mar. 2004.
14. J. Hassel, L. Grönberg, P. Helistö, and H. Seppä, "Self synchronisation effects in distributed Josephson junction arrays studied using harmonic analysis and power balance," Appl. Phys. Lett., vol. 89, no. 7, p. 072503, Aug. 2006.
15. V. Ambegaokar and A. Baratoff, "Tunneling between superconductors," Phys. Rev. Lett., vol. 11, p. 104, Jul. 1963.
16. R. E. Harris, R. C. Dynes, and D. M. Ginzberg, "Strong-coupling correction to the jump in the quasi-particle current of a superconducting tunnel junction," Phys. Rev. B, vol. 14, pp. 993-995, Aug. 1976.
17. ∞ /Nb Josephson junctions using test structures at 300 K," IEEE Trans. Appl. Supercond., vol. 9, no. 2, pp. 3236-3239, Jun. 1999.