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Volumn 37, Issue 9, 2007, Pages 1069-1075
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Characterization of reactive magnetron sputtered nanocrystalline titanium nitride (TiN) thin films with brush plated Ni interlayer
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Author keywords
Corrosion resistance; Magnetron sputtering; PVD; Thin Films; Titanium Nitride
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Indexed keywords
CORROSION RESISTANCE;
MAGNETRON SPUTTERING;
NANOCRYSTALLINE MATERIALS;
NICKEL COMPOUNDS;
PHYSICAL VAPOR DEPOSITION;
REACTION KINETICS;
THIN FILMS;
X RAY DIFFRACTION;
CORROSION BEHAVIOR;
DENSE COLUMNAR STRUCTURE;
OPTICAL QUALITY;
STEEL SUBSTRATES;
TITANIUM NITRIDE;
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EID: 34547404707
PISSN: 0021891X
EISSN: None
Source Type: Journal
DOI: 10.1007/s10800-007-9357-6 Document Type: Article |
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Times cited : (37)
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References (21)
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