Use of real-time Fourier transform infrared reflectivity as an in situ monitor of YBa2 Cu3 O7 film deposition and processing

Applied Physics Letters

Volumn 90, Issue 26, 2007, Pages

  Koster, Gertjan ^a   Huh, Jeong Uk ^a   Hammond, R H ^a   Beasley, M R ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM ALLOYS; DEPOSITION; ELECTRON BEAM LITHOGRAPHY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; REACTION KINETICS; REAL TIME SYSTEMS; THERMAL EFFECTS;

E-BEAM DEPOSITION; POSTDEPOSITION PROCESSING; REAL-TIME DIAGNOSTICS;

THIN FILMS;

EID: 34547342493     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2753118     Document Type: Article

References (11)

1. G. J. H. M. Rijnders, G. Koster, D. H. A. Blank, and H. Rogalla, Appl. Phys. Lett. 70, 1888 (1997).
2. T. Ohnishi, J. Uk-Huh, R. H. Hammond, and W. Jo, J. Mater. Res. 19, 977 (2004).
3. J.-U. Huh, thesis, Stanford University, 2006.
4. J.-U. Huh, G. Koster, M. R. Beasley, T. H. Gaballe, R.-H. Hammond (unpublished).
5. MKS Inc. or Online Systems.
6. G. Badano, M. Daraselia, and S. Sivananthan, J. Vac. Sci. Technol. B 19, 1576 (2001).
7. P. N. Arendt and S. R. Foltyn, MRS Bull. 29, 543 (2004).
8. A. Goyal, M. P. Paranthaman, and U. Schoop, MRS Bull. 29, 552 (2004).
9. L. S. J. Peng, W. Z. Wang, W. Jo, T. Ohnishi, A. F. Marshall, R. H. Hammond, M. R. Beasley, E. J. Peterson, and R. E. Ericson, IEEE Trans. Appl. Supercond. 11, 3375 (2001).
10. W. Jo, L. S. J. Peng, W. Wang, T. Ohnishi, A. F. Marshall, R. H. Hammond, M. R. Beasley, and E. J. Peterson, J. Cryst. Growth 225, 183 (2001).
11. G. Koster, T. H. Geballe, W. Wright, and W. D. Nix (unpublished).