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Applied Physics Letters

Volumn 91, Issue 2, 2007, Pages

Pneumatically actuated elastomeric device for nanoscale surface patterning

(5) Li, Shifeng a Dellinger, Timothy M a Wang, Qin a Szegedi, Sandra a Liu, Chang a

a University of Illinois at Urbana Champaign (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYDIMETHYLSILOXANE; SILICON NITRIDE; SURFACE TREATMENT;

CONTACT PRINTING; ELASTOMERIC DEVICE; PRESSURIZED GAS; SURFACE PATTERNING;

ELASTOMERS;

EID: 34547222431 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2755930 Document Type: Article

Times cited : (5)

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