Electrochemical fabrication of buried folded microchannels into silicon substrates

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 5, 2007, Pages 1464-1468

  Barillaro, G ^a   Nannini, A ^a   Piotto, M ^b  

^a UNIVERSITY OF PISA   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BURIED FOLDED; ELECTROCHEMICAL FABRICATION; MEANDER-SHAPED TRENCHES; THERMAL OXIDATION;

ASPECT RATIO; MICROMACHINING; OXIDATION; SILICON; SUBSTRATES;

MICROCHANNELS;

EID: 34547173269     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200674386     Document Type: Article

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