Nano structure formation by gas cluster ion beam irradiations at oblique incidence

Materials Research Society Symposium Proceedings

Volumn 849, Issue , 2005, Pages 109-113

  Toyoda, Noriaki ^a   Yamada, Isao ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; IRRADIATION; MONOMERS; NANOSTRUCTURED MATERIALS; SURFACE ROUGHNESS; THERMAL DIFFUSION;

GAS CLUSTER ION BEAM (GCIB); GAS CLUSTER ION BEAM IRRADIATION; MONOMER IONS; OBLIQUE INCIDENCE;

ION BEAMS;

EID: 23844479266     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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