New scintillation detector of backscattered electrons for the low voltage SEM

Journal of Microscopy

Volumn 227, Issue 1, 2007, Pages 24-29

  Wandrol, Petr ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Backscattered electrons; Compositional contrast; Detection; Low voltage SEM; Scintillation detector; Secondary electrons

Indexed keywords

BACKSCATTERING; ELECTRONS; SCINTILLATION COUNTERS; SECONDARY EMISSION;

BACKSCATTERED ELECTRONS; COMPOSITIONAL CONTRAST; DETECTION; ENERGY FILTER; LOW VOLTAGE SEM; LOW VOLTAGES; LOWER ENERGIES; PRIMARY BEAM ENERGIES; SECONDARY ELECTRONS; THEORETICAL MODELING;

SCINTILLATION;

ARTICLE; ELECTRIC POTENTIAL; ELECTRON DIFFRACTION; LOW ENERGY RADIATION; PHOTON; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SCINTILLATION; SCINTISCANNING; THEORETICAL MODEL;

EID: 34447323106     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2007.01782.x     Document Type: Article

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