Growth of LiNbO 3 thin films on sapphire by pulsed-laser deposition for electro-optic modulators

Applied Surface Science

Volumn 253, Issue 19, 2007, Pages 8263-8267

  Kilburger, S ^a,b   Chety, R ^a   Millon, E ^a   Di Bin, Ph ^b   Di Bin, C ^b   Boulle, A ^c   Guinebretiere R ^c  

^a UNIVERSITÉ DE LORRAINE   (France)

^b UNIVERSITY OF LIMOGES   (France)

^c UNIVERSITY OF LIMOGES   (France)

Author keywords

Epitaxy; LiNbO 3; Modulator; Optical waveguides; Pulsed laser deposition; Thin films

Indexed keywords

ELECTROOPTICAL DEVICES; EPITAXIAL GROWTH; FILM GROWTH; LIGHT MODULATORS; LITHIUM COMPOUNDS; OPTICAL LOSSES; OPTICAL WAVEGUIDES; PULSED LASER DEPOSITION; SAPPHIRE; X RAY DIFFRACTION;

LITHIUM NIOBATE; OXYGEN PRESSURES;

THIN FILMS;

EID: 34447300978     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.112     Document Type: Article

References (20)

1. Akazawa H., and Shimada M. Mater. Sci. Eng. B 120 1-3 (2005) 50-54
2. Yim Y.-S., and Shin S.-Y. Opt. Commun. 152 4-6 (1998) 225-228
3. Hui K.W., and Chiang K.-S. J. Lightwave Technol. 16 2 (1998) 232-238
4. Matsubara K., Niki S., Watanabe M., Fons P., Iwata K., and Yamada A. Appl. Phys. A 69 Suppl. 1 (1999) 679-681
5. Lansiaux X., Dogheche E., Remiens D., Guilloux-Viry M., Perrin A., and Ruterana P. J. Appl. Phys. 90 10 (2001) 5274-5277
6. Nashimoto K., and Cima M.J. Mater. Lett. 10 7/8 (1991) 348-354
7. Aubert P., Garry G., Bisaro R., Lopez J.G., and Garcia Lopez J. Appl. Surf. Sci. 86 1-4 (1995) 144-148
8. Boulle A., Canale L., Guinebretiere R., Girault-Di Bin C., and Dauger A. Thin Solid Films 429 1/2 (2003) 55-62
9. Haruna M., Ishizuki H., Tsutsumi J., Shimaoka Y., and Nishihara H. Jpn. J. Appl. Phys. 34 (1995) 6084-6091
10. Chrisey D.B., and Hubler G.K. Pulsed Laser Deposition of Thin Films (1994), Wiley/Interscience, New York p. 42, 299
11. Afonso C.N., Gonzalo J., Vega F., Dieguez E., Wong J.C.C., Ortega C., Siejka J., and Amsel G. Appl. Phys. Lett. 66 12 (1995) 1452-1454
12. Lee S.-H., Noh T.W., and Lee J.-H. Appl. Phys. Lett. 68 4 (1996) 472-474
13. Shibata Y., Kaya K., Akashi K., Kanai M., Kawai T., and Kawai S. Jpn. J. Appl. Phys. 32 (1993) L745
14. Chaos J.A., Perea A., Gonzalo J., Dreyfus R.W., Afonso C.N., and Perriere J. Appl. Surf. Sci. 154/155 (2000) 473-477
15. Lou Q., Ye Z., Li T., Dong J., and Engelstad R.-L. SPIE-Proceedings Series 4688 (2002) 874-877
16. Boulle A., Masson O., Guinebretière R., Lecomte A., and Dauger A. J. Appl. Cryst. 35 (2002) 606-614
17. Doolittle L.R. Nucl. Instrum. Methods Phys. Res. Sect. B: Beam Interact. Mater. Atoms 9 3 (1985) 344-351
18. Tien P.K., and Ulrich R. J. Opt. Soc. Am. 60 (1970) 1325
19. Miceli P.F., and Palmstrøm C.J. Phys. Rev. B 51 (1995) 5506
20. Derouin T.A., Lakeman C.D.E., Wu X.H., Speck J.S., and Lange F.F. J. Mater. Res. 12 5 (1997) 1391