Electro-optic properties of c-axis oriented LiNbO3 films grown on Si(1 0 0) substrate

Materials Science and Engineering: B

Volumn 120, Issue 1-3, 2005, Pages 50-54

  Akazawa, Housei ^a   Shimada, Masaru ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Electro optic effect; Lithium niobate; Poling; Refractive index change; Spectroscopic ellipsometry

Indexed keywords

DISPERSION (WAVES); ELECTRIC FIELDS; ELECTROOPTICAL EFFECTS; FILM GROWTH; LITHIUM NIOBATE; SPUTTERING; SUBSTRATES;

ELECTRO-OPTIC EFFECT; PLASMA SPUTTERING; POLING; REFRACTIVE INDEX CHANGE; SPECTROSCOPIC ELLIPSOMETRY;

CRYSTALLINE MATERIALS;

EID: 19044374446     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2005.02.018     Document Type: Conference Paper

References (27)

1. L.E. Myers, R.C. Eckardt, M.M. Fejer, R.L. Byer, W.R. Bosenberg, and J.W. Pierce J. Opt. Soc. Am. B 12 1995 2102
2. H. Qiao, J. Xu, S. Liu, X. Zhang, Q. Sun, H. Huang, and G. Zhang Opt. Lett. 26 2001 1221
3. T.A. Rost, H. Lin, and T.A. Rabson Appl. Phys. Lett. 59 1991 3654
4. V. Joshi, D. Roy, and M.L. Mecartney Appl. Phys. Lett. 53 1988 1800
5. T.A. Rost, H. Lin, T.A. Rabson, R.C. Baumann, and D.L. Callahan J. Appl. Phys. 72 1992 4336
6. H. Akazawa, and M. Shimada J. Vac. Sci. Technol. A 22 2004 1793
7. H. Akazawa, and M. Shimada J. Cryst. Growth 270 2004 560
8. J.L. Steverson J. Phys. D: Appl. Phys. 6 1973 L13
9. M. Sigelle, and R. Hierle J. Appl. Phys. 52 1981 4199
10. K.D. Singer, M.G. Kuzyk, W.R. Holland, J.E. Sohn, S.J. Lalama, R.B. Comizzoli, H.E. Katz, and M.L. Schilling Appl. Phys. Lett. 53 1988 1800
11. G.E. Peterson, A.A. Ballman, P.V. Lenzo, and P.M. Bridenbaugh Appl. Phys. Lett. 5 1964 62
12. P.V. Lenzo, E.G. Spencer, and K. Nassau J. Opt. Soc. Am. 56 1966 633
13. H. Adachi, T. Kawaguchi, K. Setsune, K. Ohji, and K. Wasa Appl. Phys. Lett. 42 1983 867
14. K. Takizawa, and M. Okada Opt. Soc. Am. B 2 1985 289
15. K. Nomura, and H. Ogawa J. Appl. Phys. 70 1991 3234
16. J.C. Loulergue, M. Dumont, Y. Levy, P. Robin, J.P. Pocholle, and M. Papuchon Thin Solid Films 160 1988 399
17. D. Morichere, V. Dentan, F. Kajzar, P. Robin, Y. Levy, and M. Dumont Opt. Com. 74 1989 69
18. H. Uchiki, and T. Kobayashi J. Appl. Phys. 64 1988 2625
19. T. Kobayashi, H. Uchiki, and K. Minoshima SPIE Symp. Proc. 971 1988 59
20. T. Kobayashi, K. Minoshima, S. Nomura, S. Fukaya, and A. Ueki SPIE Symp. Proc. 1147 1989 182
21. T. Nagata, T. Shimura, A. Ahida, N. Fujimura, and T. Ito J. Cryst. Growth 237-239 2002 533
22. E.D. Palik, Handbook of Optical Constants of Solids, Academic, Orlando, 1985.
23. A.M. Prokhorov, and Y.S. Kuz'minov Physics and Chemistry of Crystalline Lithium Niobate 1990 Adam Hilger Bristol
24. G. Griffel, S. Ruschin, and N. Croitoru Appl. Phys. Lett. 54 1989 1385
25. M. Haruna, H. Ishizuki, J. Tsutsumi, Y. Shimaoka, and H. Nishihara Jpn. J. Appl. Phys. 34 1995 6084
26. C.H.J. Huang, and T.A. Rabson IEEE Electron Dev. Lett. 13 1992 609
27. M. Nakamura, S. Ohno, M. Tsuji, K. Ohno, T. Kohyama, M. Izutsu, and T. Sueta Tech. Rep. IEICE OQE 92 1992 139