On the possibility of chemo-mechanical action in polishing silicon nitride

American Society of Mechanical Engineers, Center for Research and Technology Development, (Publication) CRTD

Volumn 30, Issue , 1994, Pages 81-97

  Raghunandan, M ^a   Umehara, N ^a   Komanduri, R ^a  

^a OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; ALUMINA; CATALYSTS; CHROMATES; FRACTURE; OXIDATION; PITTING; REMOVAL; SILICON NITRIDE; TEXTURES; WEAR OF MATERIALS;

CHEMICAL STABILITY; CHEMOMECHANICAL ACTION; FINE MATERIAL REMOVAL;

POLISHING;

EID: 0028735572     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)