Mg-C films deposited by radio-frequency sputtering

Scripta Materialia

Volumn 57, Issue 6, 2007, Pages 489-491

  Kondoh, K ^a   Serikawa, T ^a   Kawabata, K ^a   Yamaguchi, T ^b  

^a OSAKA UNIVERSITY   (Japan)

^b Gifu Prefectural Science and Technology Promotion Center   (Japan)

Author keywords

Amorphous; Carbon doping; Mg C film; Optically transparent; Sputtering

Indexed keywords

CARBON DOPING; MAGNESIUM PLATES; OPTICALLY TRANSPARENT FILM; RADIO FREQUENCY SPUTTERING;

AMORPHOUS FILMS; CARBON; DOPING (ADDITIVES); MAGNESIUM; MAGNETRON SPUTTERING; TRANSPARENCY;

METALLIC FILMS;

EID: 34447266425     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.05.033     Document Type: Article

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