Hybrid powder-sol-gel PZT thick films on metallic membranes for piezoelectric applications

Journal of the European Ceramic Society

Volumn 27, Issue 13-15, 2007, Pages 4139-4142

  Es Souni, M ^a   Maximov, S ^a   Piorra, A ^a   Krause, J ^a   Solterbeck, C H ^a  

^a UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Dielectric properties; Membranes; PZT; Sensors; Sol gel processes

Indexed keywords

CHARACTERIZATION; NICKEL ALLOYS; RESONANCE; SILICON; SOL-GEL PROCESS; SPIN COATING;

LEAD ZIRCONATE TITANATE; PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC HYSTERESIS LOOPS;

PIEZOELECTRIC CERAMICS;

CHARACTERIZATION; NICKEL ALLOYS; PIEZOELECTRIC CERAMICS; RESONANCE; SILICON; SOL-GEL PROCESS; SPIN COATING;

EID: 34347329207     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2007.02.107     Document Type: Article

References (15)

1. Uchino K. Ferroelectric Devices (2000), Marcel Decker, New York
2. Li X., Shih W.Y., Aksay I.A., and Shih W.-H. Electromechanical behaviour of PZT-brass unimorphs. J. Am. Ceram. Soc. 82 (1999) 1733-1740
3. Sugawara Y., Onitsuka K., Yoshikawa S., Xu Q.H., and Newnham R.E. Metal-ceramic composite. J. Am. Ceram. Soc. 75 (1992) 996-998
4. 31 piezoelectric constant measurement of lead zirconate titanate thin films. J. Appl. Phys. 86 (1999) 7017-7023
5. Lefki K., and Dormans G.J.M. Measurement of piezoelectric coefficient of ferroelectric thin films. J. Appl. Phys. 76 (1994) 1764-1767
6. 31 piezoelectric coefficient of lead zirconate titanate thin films. J. Appl. Phys. 85 (1999) 6711-6716
7. Lian L., and Sottos N.R. Stress effects in sol-gel derived ferroelectric thin films. J. Appl. Phys. 95 (2004) 629-634
8. Barrow D.A., Petroff T.E., Tandon R.P., and Sayer M. Characterization of thick lead zirconate titanate using a new sol-gel process. J. Appl. Phys. 81 (1997) 876-881
9. Es-Souni M., Piorra A., and Solterbeck C.-H. Processing and characterization of high-quality thick PZT films. Ferroelectrics 293 (2003) 63-68
10. Es-Souni M., Kuhnke M., Piorra A., and Solterbeck C.-H. Pyroelectric and piezoelectric properties of thick PZT-films produced by a new sol-gel route. J. Eur. Ceram. Soc. 25 (2005) 2499-2503
11. Maria J.-P., Cheek K., Streiffer S., Kim S.-H., Dunn G., and Kingon A. Lead zirconate titanate thin films on base-metal foils: an approach for embedded high-permittivity passive components. J. Am. Ceram. Soc. 84 (2001) 2436-2438
12. Henn R., Honma T., and Finkbeiner S. Thin films on steel. In: Marek J., Trah H.-P., Suzuki Y., and Yokomori I. (Eds). Sensors for Automotive Applications (2003), Wiley-VCH, Weinheim 123-143
13. Kingon A., and Srinivasan S. lead zirconate titanate thin films directly on copper for ferroelectric, dielectric and piezoelectric applications. Nat. Mater. 4 (2005) 233-237
14. 3/metal substrate heterostructures. Appl. Phys. Lett. 86 (2005) 022907-022910
15. Es-Souni M., Maximov S., Krause J., Piorra A., Stange G., and Solterbeck C.-H. Hybrid powder-Sol-Gel ferroelectric thin films on metallic membranes for piezoelectric applications. Ferroelectrics 336 (2006) 197-207