Linear displacement sensor using a new CMOS double-hall device

Sensors and Actuators, A: Physical

Volumn 138, Issue 1, 2007, Pages 37-43

  Roumenin, Ch S ^a   Lozanova, S V ^a  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

Author keywords

CMOS Hall device; Contactless measurement techniques; Offset reduction; Permanent magnets actuating system

Indexed keywords

ACTUATORS; ELECTROMAGNETIC INDUCTION; FERRITES; HALL EFFECT DEVICES; PERMANENT MAGNETS; SENSORS;

CMOS HALL DEVICES; CONTACTLESS MEASUREMENT TECHNIQUES; LINEAR DISPLACEMENT SENSORS; MAGNETOSENSITIVITIES; OFFSET REDUCTION; PERMANENT MAGNETS ACTUATING SYSTEM;

CMOS INTEGRATED CIRCUITS;

EID: 34347227422     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.042     Document Type: Article

References (24)

1. Netzer Y. A very linear noncontact displacement measurement with a Hall-element magnetic sensor. Proc. IEEE 69 4 (1981) 491-492
2. Kano Y., Hasebe H., Huang C., Yamada T., and Inubuse M. Linear position detector with rod shape electromagnet. IEEE Trans. Magn. 26 5 (1990) 2023-2025
3. Roumenin Ch.S. New magnetomodulating systems for contactless measurement of linear displacements. Compt. Rend. ABS 41 4 (1988) 25-28
4. Blache C., and Lemarquand G. New structures for linear displacement sensor with high magnetic field gradient. IEEE Trans. Magn. 28 5 (1992) 2196-2198
5. Grechishkin R.M., Afanasieva L.E., Pastushenkov Yu.G., and Maksimov N.N. Analysis of a linear position sensor with a Hall effect element. Meas. Sci. Technol. 5 (1994) 853-860
6. Middelhoek S., and Audet S.A. Silicon Sensors (1989), Academic Press, London
7. Roumenin Ch. Solid State Magnetic Sensors (1994), Elsevier, Amsterdam
8. Weiss H. Physik und Anwendung Galvanomagnetischer Bauelemente (1969), Vieweg, Braunschweig
9. Roumenin Ch.S., Nikolov D., Lozanova S., Ivanov A., and Dimitrov K. Double- Hall sensor with reduced offset and temperature drift. Proceedings of the Eurosensors XIX Conference. Barcelona, Spain (2005)
10. Hackner M., Hohne H.-P., and Ernst R. A very low offset Hall device in standard CMOS technology. Proceedings of the 16th European Conference on Solid-State Transducers. Prague (2002) 598-599
11. Muller-Schwanneke C., Jost F., Marx K., Lindenkreuz S., and von Klitzing K. Offset reduction in silicon Hall sensors. Sens. Actuators A81 (2000) 18-22
12. Mani R.G., and von Klitzing K. Hall effect under null conditions. Appl. Phys. Lett. 64 10 (1994) 1262-1264
13. Mani R.G., and von Klitzing K. Temperature insensitive offset reduction in a Hall effect device. Appl. Phys. Lett. 64 23 (1994) 3121-3123
14. Improved Hall devices find new uses: orthogonal coupling yields sensitive products with reduced voltage offsets and low drift, Electron Weekly, 4 (1985) 59-61.
15. Munter P.J.A. A low-offset spinning-current Hall plate. Sens. Actuators A21-A23 (1990) 743-746
16. Bellekom A.A., and Munter P.J.A. Offset reduction in spinning-current Hall plates. Sens. Mater. 5 5 (1994) 253-263
17. Steiner R., Maier C., Bellekom S., and Baltes H. Influence of mechanical stress on the offset voltage of Hall devices operated with spinning current method. J. Microelectrom. Sys. 8 4 (1999) 466-472
18. Steiner R., Maier Ch., Haberli A., Steiner F.-P., and Baltes H. Offset reduction in Hall devices by continuous spinning current method. Sens. Actuators A66 (1998) 167-172
19. Steiner R., Schneider M., and Baltes H. Double Hall sensor with self- compensated offset. Techn. Digest of IEDM '97 (1997) 991-994
20. Ch.S. Roumenin, Hall effect sensor, Bulg., Patent no. 41974 (May 6, 1986).
21. Roumenin Ch.S. Parallel-field Hall microsensors: an overview. Sens. Actuators A30 (1992) 77-87
22. Roumenin Ch.S., Nikolov D., and Ivanov A. A novel parallel-field hall sensor with low offset and temperature drift based 2D integrated magnetometer. Sens. Actuators A115 (2004) 303-307
23. Dutton B., Boonsang S., and Dewhurst R.J. A new magnetic configuration for s small in-plane electromagnetic acoustic transducer applied to laser-ultrasound measurements: modelling and validation. Sens. Actuators A125 (2006) 249-259
24. Sensor, Device Data, Motorola, DL200/D, Rev 2, 1995.