Sliding-mode control for a two-dimensional piezo-positioning stage

IET Control Theory and Applications

Volumn 1, Issue 4, 2007, Pages 1104-1113

  Huang, P K ^a   Shieh, P H ^a   Lin, F J ^a   Shieh, H J ^a  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; HYSTERESIS; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; ROBUSTNESS (CONTROL SYSTEMS); STABILITY;

ASYMPTOTIC SLIDING SURFACE; NON-CONTANT STIFFNESS; PIEZO-POSITIONING STAGE;

SLIDING MODE CONTROL;

EID: 34250838046     PISSN: 17518644     EISSN: 17518652     Source Type: Journal    
DOI: 10.1049/iet-cta:20060371     Document Type: Article

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