Reactive multilayer foils for silicon wafer bonding

Materials Research Society Symposium Proceedings

Volumn 968, Issue , 2007, Pages 51-56

  Qiu, Xiaotun ^a   Wang, Jiaping ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT SOURCES; HERMETICITY; MULTILAYER FOILS;

BONDING; COMPUTER SIMULATION; EXOTHERMIC REACTIONS; HERMETIC DEVICES; WAFER BONDING; X RAY DIFFRACTION ANALYSIS;

SILICON WAFERS;

EID: 34250822819     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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