Two-dimensional fluid simulation of VHF-ICP source with parallel resonance antenna

Computer Physics Communications

Volumn 177, Issue 1-2 SPEC. ISS., 2007, Pages 133-

  Lee, Sunghee ^a   Choi, Sunmi ^a   Shon, Jongwon ^b  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Jusung Engineering Company Limited   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; ELECTRIC FIELD EFFECTS; ENERGY BALANCE; PLASMA DENSITY; POISSON EQUATION; WAVE EQUATIONS;

FLUID SIMULATION; MOMENTUM EQUATIONS; RESONANCE ANTENNA;

INDUCTIVELY COUPLED PLASMA;

EID: 34250795605     PISSN: 00104655     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cpc.2007.02.013     Document Type: Article

References (2)

1. Park S.E., Cho B.U., Lee J.K., Lee Y.J., and Yeom G.Y. IEEE Trans. Plasma Sci. 31 (2003) 628
2. Lee P.W., Kim S.S., Seo S.H., Chang C.S., Chang H.Y., Ichiki T., and Horike Y. Jpn. J. Appl. Phys. 39 (2000) L548