New inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 6 A, 2000, Pages

  Lee, Pyung Woo ^a,c   Kim, Sung Sik ^a   Seo, Sang Hun ^a   Chang, Choong Seock ^a   Chang, Hong Young ^a   Ichiki, Takanori ^b   Horiike, Yasuhiro ^b,d  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b TOYO UNIVERSITY   (Japan)

^c Semiconductor Advanced Research Division   (South Korea)

^d UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC INDUCTORS; PLASMA DEVICES;

INDUCTIVELY-COUPLED PLASMAS (ICP); SEGMENTED COIL ANTENNAS;

ANTENNAS;

EID: 0033723610     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l548     Document Type: Article

References (12)