Ordering of Ge nanocrystals using FIB nanolithography

Surface Science

Volumn 601, Issue 13, 2007, Pages 2769-2773

  Karmous, A ^a   Berbezier, I ^a   Ronda, A ^a   Hull, R ^b   Graham, J ^b  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b University of Virginia   (United States)

Author keywords

FIB lithography; Growth; MBE; Nanocrystal ordering; Nanostructures; Patterned substrate; SiGe; Unwetting

Indexed keywords

CONTAMINATION; FOCUSED ION BEAMS; MOLECULAR BEAM EPITAXY; NANOLITHOGRAPHY; SEMICONDUCTING GERMANIUM; SILICA;

FIB LITHOGRAPHY; NANOCRYSTAL ORDERING; PATTERNED SUBSTRATES;

NANOCRYSTALS;

LITHOGRAPHY; SEMICONDUCTORS; SILICA;

EID: 34250791154     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.12.075     Document Type: Article

References (13)

1. Yakimov A.I., Dvurechenskii A.V., Kirienko V.V., Yakovlev Y.I., and Nikiforov A.I. Phys. Rev. B 61 (2000) 10868
2. Peng C.S., Hung Q., Cheng W.Q., Zhou J.M., Zhang Y.H., Sheng T.T., and Tung C.H. Phys. Rev. B 57 (1998) 8805
3. Shiraki Y., Sunamura H., Usami N., and Fukatsu S. Appl. Surf. Sci. 102 (1996) 263
4. Tiwari S., Rana F., Chan K., Hanafi H., Chan W., and Buchanan D. Dig. -Int. Electron Devices Meet. 1995 (1995) 521
5. Yang B., Liu F., and Lagally M.G. Phys. Rev. Lett. 92 (2004) 025502
6. Borgström M., Zela V., and Seifert W. Nanotechnology 14 (2003) 264
7. Karmous A., Cuenat A., Ronda A., Berbezier I., Atha S., and Hull R. Appl. Phys. Lett. 85 (2004) 6401
8. Srolovitz D.J. Acta Metall. 37 (1989) 621
9. Yang B., liu F., and Lagally M.G. Phys. Rev. Lett. 92 (2004) 025502
10. The hole side walls are oriented with an angle of ∼8 ± 2° with respect to Si(0 0 1) planes. This orientation do not represent a stable planar silicon surface but is formed by Si(0 0 1) terraces and steps. Baski A.A., Erwin S.C., and Whitman L.J. Surf. Sci. 392 (1997) 69
11. Nurminen L., Kuronen A., and Kashi K. Phys. Rev. B 63 (2000) 035407
12. Karmous A., Berbezier I., and Ronda A. Phys. Rev. B 73 (2006) 075323
13. Briscoe B.J., and Galvin K.P. Phys. Rev. A 43 (1991) 1906