Capacity planning method for semiconductor fab with time constraints between operations

2006 SICE-ICASE International Joint Conference

Volumn , Issue , 2006, Pages 1100-1103

  Kitamura, Shoichi ^a   Mori, Kazuyuki ^a   Ono, Akira ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b RENESAS TECHNOLOGY CORP   (Japan)

Author keywords

Capacity planning; Queue time; Queuing theory; Risk based planning; Semiconductor fabrication

Indexed keywords

CAPACITY PLANNING; QUEUE TIME CONSTRAINTS; QUEUING THEORY; RISK BASED PLANNING;

COMPUTER SIMULATION; CONSTRAINT THEORY; PROCESS PLANNING; QUALITY CONTROL; QUEUEING THEORY; RISK ANALYSIS; SILICON WAFERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 34250782621     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SICE.2006.315820     Document Type: Conference Paper

References (5)

1. Robinson, Giglio, "Capacity Planning for Semiconductor Wafer Fabrication with Time Constraints between Operators," Proceeding of 1999 Winter Simulation Conference, pp 880-887, 1999.
2. K. Mori, M. Tsukiyama and T. Fukuda, "Artificial Immunity Based Management System for a Semiconductor Production Line," Proceeding of IEEE 1997 Int. Conf. on Systems, Man, and Cybernetics, pp 851-855, 1997.
3. Min-Yu Hsieh, Ming-Hsiu Hsieh, Philip Chen and H. W Sie, "Innovations in Time Constraint Management," International Symposium on Semiconductor Manufacturing 2002 Conference Proceedings, pp 285-288, 2002.
4. J. A. While, J. W. Schmidt, and G. K. Bennett, "Analysis of Queueing Systems," Academic Press, NewYork, 1975.
5. Christopher Konarski, Neil Peruffo and Ron Warren, "The Need for Speed: IBM's Raw Process Time Reduction Success Means Faster Turnaround Time for Customers," IBM Micro News Fourth Quarter 2001, vol.7, No.4, pp 8-10, 2001.