Artificial immunity based management system for a semiconductor production line

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics

Volumn 1, Issue , 1997, Pages 851-855

  Mori, Kazuyuki ^a   Tsukiyama, Makoto ^a   Fukuda, Toyoo ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; EXPERT SYSTEMS; LARGE SCALE SYSTEMS; PROCESS CONTROL;

ARTIFICIAL IMMUNITY BASED MANAGEMENT SYSTEM; SEMICONDUCTOR PRODUCTION LINE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031355419     PISSN: 08843627     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)