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Volumn 24, Issue 5, 2007, Pages 1066-1074

Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO2 films

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; LASER BEAM EFFECTS; OPTICAL BAND GAPS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SOL-GELS; THERMAL EFFECTS; ZIRCONIUM COMPOUNDS;

EID: 34250750275     PISSN: 07403224     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAB.24.001066     Document Type: Article
Times cited : (31)

References (43)
  • 1
    • 0001256864 scopus 로고
    • Preparation of dielectric HR mirrors from colloid oxide suspensions containing organic polymer binders
    • J. D. Mackenzie, ed, Proc. SPIE
    • I. Thomas, "Preparation of dielectric HR mirrors from colloid oxide suspensions containing organic polymer binders," in Sol-Gel Optics III, J. D. Mackenzie, ed., Proc. SPIE 2288, 50-55 (1994).
    • (1994) Sol-Gel Optics III , vol.2288 , pp. 50-55
    • Thomas, I.1
  • 2
    • 0034481951 scopus 로고    scopus 로고
    • Room-temperature mirror preparation using sol-gel chemistry and laminar-flow coating technique
    • Ph. Belleville, C. Bonnin, and J. J. Priotton, "Room-temperature mirror preparation using sol-gel chemistry and laminar-flow coating technique," J. Sol-Gel Sci. Technol. 19, 223-226 (2000).
    • (2000) J. Sol-Gel Sci. Technol , vol.19 , pp. 223-226
    • Belleville, P.1    Bonnin, C.2    Priotton, J.J.3
  • 4
    • 0033748556 scopus 로고    scopus 로고
    • Scandia optical mirrors for application at 351 nm
    • D. Grosso and P. A. Seromon, "Scandia optical mirrors for application at 351 nm," Thin Solid Films 368, 116-124 (2000).
    • (2000) Thin Solid Films , vol.368 , pp. 116-124
    • Grosso, D.1    Seromon, P.A.2
  • 5
    • 1942502815 scopus 로고    scopus 로고
    • How smooth chemistry allows high power laser optical coating preparation
    • C. Amra, N. Kaiser, and H. A. Macleod, eds. Proc. SPIE
    • Ph. Belleville, Ph. Prené, C. Bonnin, L. Beaurain, Y. Montouillout, and É. Lavastre, "How smooth chemistry allows high power laser optical coating preparation," in Advances in Optical Thin Films, C. Amra, N. Kaiser, and H. A. Macleod, eds. Proc. SPIE 5250, 196-202 (2004).
    • (2004) Advances in Optical Thin Films , vol.5250 , pp. 196-202
    • Belleville, P.1    Prené, P.2    Bonnin, C.3    Beaurain, L.4    Montouillout, Y.5    Lavastre, E.6
  • 8
    • 0032069389 scopus 로고    scopus 로고
    • Defect induced laser damage in oxide multilayer mirrors for 248 nm
    • M. Reichling, A. Bodemann, and N. Kaiser, "Defect induced laser damage in oxide multilayer mirrors for 248 nm," Thin Solid Films 320, 264-279 (1998).
    • (1998) Thin Solid Films , vol.320 , pp. 264-279
    • Reichling, M.1    Bodemann, A.2    Kaiser, N.3
  • 9
    • 1842476954 scopus 로고    scopus 로고
    • Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation
    • Y. A. Zhao, W. D. Gao, J. D. Shao, and Z. X. Fan, "Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation," Appl. Surf. Sci. 227, 275-281 (2004).
    • (2004) Appl. Surf. Sci , vol.227 , pp. 275-281
    • Zhao, Y.A.1    Gao, W.D.2    Shao, J.D.3    Fan, Z.X.4
  • 10
    • 0042121551 scopus 로고    scopus 로고
    • Sol-gel broadband anti-reflective single-layer silica films with high laser damage threshold
    • Y. Xu, B. Zhang, W. H. Fan, D. Wu, and Y. H. Sun, "Sol-gel broadband anti-reflective single-layer silica films with high laser damage threshold," Thin Solid Films 440, 180-183 (2003).
    • (2003) Thin Solid Films , vol.440 , pp. 180-183
    • Xu, Y.1    Zhang, B.2    Fan, W.H.3    Wu, D.4    Sun, Y.H.5
  • 11
    • 18144395064 scopus 로고    scopus 로고
    • Durable sol-gel antireflective films with high laser-induced damage thresholds for inertial confinement fusion
    • Y. Xu, L. Zhang, D. Wu, Y. H. Sun, Z. X. Huang, X. D. Jiang, X. F. Wei, Z. H. Li, B. Z. Dong, and Z. H. Wu, "Durable sol-gel antireflective films with high laser-induced damage thresholds for inertial confinement fusion," J. Opt. Soc. Am. B 22, 905-912 (2005).
    • (2005) J. Opt. Soc. Am. B , vol.22 , pp. 905-912
    • Xu, Y.1    Zhang, L.2    Wu, D.3    Sun, Y.H.4    Huang, Z.X.5    Jiang, X.D.6    Wei, X.F.7    Li, Z.H.8    Dong, B.Z.9    Wu, Z.H.10
  • 12
    • 1942457263 scopus 로고    scopus 로고
    • High mechanical damage resistant sol-gel mirror for high power lasers
    • C. Amra, N. Kaiser, and H. A. Macleod, eds, Proc. SPIE
    • M. C. Ferrara, M. R. Perrone, M. L. Protopapa, J. Sancho-Parramon, S. Bosch, and S. Mazzarelli, "High mechanical damage resistant sol-gel mirror for high power lasers," in Advances in Optical Thin Films, C. Amra, N. Kaiser, and H. A. Macleod, eds., Proc. SPIE 5250, 537-545 (2004).
    • (2004) Advances in Optical Thin Films , vol.5250 , pp. 537-545
    • Ferrara, M.C.1    Perrone, M.R.2    Protopapa, M.L.3    Sancho-Parramon, J.4    Bosch, S.5    Mazzarelli, S.6
  • 14
    • 0008820824 scopus 로고
    • Characterization of titanium and zirconium valerate sol-gel films
    • G. S. Kathryn and S. L. Jeffrey, "Characterization of titanium and zirconium valerate sol-gel films," Chem. Mater. 6, 890-898 (1994).
    • (1994) Chem. Mater , vol.6 , pp. 890-898
    • Kathryn, G.S.1    Jeffrey, S.L.2
  • 16
    • 0035422373 scopus 로고    scopus 로고
    • Control of the polymerization process of multicomponent (Si, Ti, Zr) sols using chelating agents
    • J. Méndez-Vivar, R. Mendoze-Serna, and L. Valdez-Castro, "Control of the polymerization process of multicomponent (Si, Ti, Zr) sols using chelating agents," J. Non-Cryst. Solids 288, 200-209 (2001).
    • (2001) J. Non-Cryst. Solids , vol.288 , pp. 200-209
    • Méndez-Vivar, J.1    Mendoze-Serna, R.2    Valdez-Castro, L.3
  • 17
    • 0033896678 scopus 로고    scopus 로고
    • Synthesis of highly stabilized zirconia sols from zirconium n-propoxide-diglycol system
    • J. P. Zhao, W. H. Fan, D. Wu, and Y. H. Sun, "Synthesis of highly stabilized zirconia sols from zirconium n-propoxide-diglycol system," J. Non-Cryst. Solids 261, 15-20 (2000).
    • (2000) J. Non-Cryst. Solids , vol.261 , pp. 15-20
    • Zhao, J.P.1    Fan, W.H.2    Wu, D.3    Sun, Y.H.4
  • 18
    • 0024718322 scopus 로고
    • Optical coatings prepared from colloidal media
    • H. G. Floch, J. P. Priotton, and I. M. Thomas, "Optical coatings prepared from colloidal media," Thin Solid Films 175, 173-178 (1989).
    • (1989) Thin Solid Films , vol.175 , pp. 173-178
    • Floch, H.G.1    Priotton, J.P.2    Thomas, I.M.3
  • 19
    • 0036105076 scopus 로고    scopus 로고
    • Preparation and characterization of doped sol-gel zirconia films
    • W. M. Liu, Y. X. Chen, C. F. Ye, and P. Y. Zhang, "Preparation and characterization of doped sol-gel zirconia films," Ceram. Int. 28, 349-354 (2002).
    • (2002) Ceram. Int , vol.28 , pp. 349-354
    • Liu, W.M.1    Chen, Y.X.2    Ye, C.F.3    Zhang, P.Y.4
  • 20
    • 0343724594 scopus 로고    scopus 로고
    • Temperature and ionic size dependence on the structure and optical properties of nanocrystalline lanthanide doped zirconia thin films
    • A. Hartridge, M. Ghanashyam Krishna, and A. K. Bhattacharya, "Temperature and ionic size dependence on the structure and optical properties of nanocrystalline lanthanide doped zirconia thin films," Thin Solid Films 384, 254-260 (2001).
    • (2001) Thin Solid Films , vol.384 , pp. 254-260
    • Hartridge, A.1    Ghanashyam Krishna, M.2    Bhattacharya, A.K.3
  • 22
    • 0020940620 scopus 로고
    • Determination of the thickness and optical constants of amorphous silicon
    • R. Swanepoel, "Determination of the thickness and optical constants of amorphous silicon," J. Phys. E 16, 1214-1222 (1983).
    • (1983) J. Phys. E , vol.16 , pp. 1214-1222
    • Swanepoel, R.1
  • 23
    • 33646439827 scopus 로고    scopus 로고
    • S. H. Wemple and M. DiDomenico, Jr., Behavior of the electronic dielectric constant in covalent and ionic materials, Phys. Rev. B 3, 1338-1351 (1971).
    • S. H. Wemple and M. DiDomenico, Jr., "Behavior of the electronic dielectric constant in covalent and ionic materials," Phys. Rev. B 3, 1338-1351 (1971).
  • 24
    • 0043220896 scopus 로고    scopus 로고
    • x films, J. Non-Cryst. Solids 315, 134-143 (2003).
    • x films," J. Non-Cryst. Solids 315, 134-143 (2003).
  • 25
    • 33845428113 scopus 로고    scopus 로고
    • 2 thin film systems achieved through reactive electron beam codeposition process
    • 2 thin film systems achieved through reactive electron beam codeposition process," Appl. Surf. Sci. 253, 618-626 (2006).
    • (2006) Appl. Surf. Sci , vol.253 , pp. 618-626
    • Sahoo, N.K.1    Thakur, S.2    Tokas, R.B.3
  • 26
    • 1642406847 scopus 로고    scopus 로고
    • Thermodynamic tetragonal phase stability in sol-gel derived nanodomains of pure zirconia
    • S. Shukla and S. Seal, "Thermodynamic tetragonal phase stability in sol-gel derived nanodomains of pure zirconia," J. Phys. Chem. B 108, 3395-3399 (2004).
    • (2004) J. Phys. Chem. B , vol.108 , pp. 3395-3399
    • Shukla, S.1    Seal, S.2
  • 28
    • 0017017243 scopus 로고
    • A simple method for the determination of the optical constants n,k and the thickness of a weakly absorbing thin film
    • J. C. Manifacier, J. Gasiot, and J. P. Fillard, "A simple method for the determination of the optical constants n,k and the thickness of a weakly absorbing thin film," J. Phys. E 9, 1002-1004 (1976).
    • (1976) J. Phys. E , vol.9 , pp. 1002-1004
    • Manifacier, J.C.1    Gasiot, J.2    Fillard, J.P.3
  • 30
    • 0035889512 scopus 로고    scopus 로고
    • Studies on the structural, microstructural and optical properties of sol-gel derived lead lanthanum titanate thin films
    • S. Bhaskar, S. B. Majumder, M. Jain, P. S. Dobal, and R. S. Katiyar, "Studies on the structural, microstructural and optical properties of sol-gel derived lead lanthanum titanate thin films," Mater. Sci. Eng., B 87, 178-190 (2001).
    • (2001) Mater. Sci. Eng., B , vol.87 , pp. 178-190
    • Bhaskar, S.1    Majumder, S.B.2    Jain, M.3    Dobal, P.S.4    Katiyar, R.S.5
  • 31
    • 0000673252 scopus 로고    scopus 로고
    • Zirconia and zirconia-ORMOSIL planar waveguides prepared at room temperature
    • Y. Sorek, M. Zevin, and R. Reisfeld, "Zirconia and zirconia-ORMOSIL planar waveguides prepared at room temperature," Chem. Mater. 9, 670-676 (1997).
    • (1997) Chem. Mater , vol.9 , pp. 670-676
    • Sorek, Y.1    Zevin, M.2    Reisfeld, R.3
  • 32
    • 0242266941 scopus 로고    scopus 로고
    • Effect of synthetic parameters on structure, textural, and catalytic properties of nanocrystalline sulfated zirconia prepared by sol-gel technique
    • M. K. Mishra, B. Tyagi, and R. V. Jasra, "Effect of synthetic parameters on structure, textural, and catalytic properties of nanocrystalline sulfated zirconia prepared by sol-gel technique," Ind. Eng. Chem. Res. 42, 5727-5736 (2003).
    • (2003) Ind. Eng. Chem. Res , vol.42 , pp. 5727-5736
    • Mishra, M.K.1    Tyagi, B.2    Jasra, R.V.3
  • 33
    • 0008820824 scopus 로고
    • Characterization of titanium and zirconium valerate sol-gel films
    • K. G. Severin, J. S. Ledford, B. A. Torgerson, and K. A. Berglund, "Characterization of titanium and zirconium valerate sol-gel films," Chem. Mater. 6, 890-898 (1994).
    • (1994) Chem. Mater , vol.6 , pp. 890-898
    • Severin, K.G.1    Ledford, J.S.2    Torgerson, B.A.3    Berglund, K.A.4
  • 35
    • 0035975471 scopus 로고    scopus 로고
    • Phase transformation in the surface region of zirconia detected by UV Raman spectroscopy
    • M. J. Li, Z. C. Feng, G. Xiong, P. L. Ying, Q. Xin, and C. Li, "Phase transformation in the surface region of zirconia detected by UV Raman spectroscopy," J. Phys. Chem. B 105, 8107-8111 (2001).
    • (2001) J. Phys. Chem. B , vol.105 , pp. 8107-8111
    • Li, M.J.1    Feng, Z.C.2    Xiong, G.3    Ying, P.L.4    Xin, Q.5    Li, C.6
  • 37
    • 0030785963 scopus 로고    scopus 로고
    • Characterization of oxygen deficiency and trivalent zirconium in sol-gel derived zirconia films
    • S. Jana and P. K. Biswas, "Characterization of oxygen deficiency and trivalent zirconium in sol-gel derived zirconia films," Mater. Lett. 30, 53-58 (1997).
    • (1997) Mater. Lett , vol.30 , pp. 53-58
    • Jana, S.1    Biswas, P.K.2
  • 38
    • 0031289894 scopus 로고    scopus 로고
    • Absorption of laser light by ions as a mechanism of optical damage in solids
    • G. Exarhos, A. Guenther, M. Kozlowski, K. L. Lewis, and M. J. Soileau, eds, Proc. SPIE
    • V. N. Strekalov, "Absorption of laser light by ions as a mechanism of optical damage in solids," in Laser-Induced Damage in Optical Materials, G. Exarhos, A. Guenther, M. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3244, 26-30 (1997).
    • (1997) Laser-Induced Damage in Optical Materials , vol.3244 , pp. 26-30
    • Strekalov, V.N.1
  • 39
    • 34250696118 scopus 로고    scopus 로고
    • The path integrals method and description of valence band impact ionization under multiphoton heating of electrons
    • G. Exarhos, A. Guenther, M. Kozlowski, K. L. Lewis, and M. J. Soileau, eds, Proc. SPIE
    • V. N. Strekalov, "The path integrals method and description of valence band impact ionization under multiphoton heating of electrons," in Laser-Induced Damage in Optical Materials, G. Exarhos, A. Guenther, M. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3578, 256-263 (1998).
    • (1998) Laser-Induced Damage in Optical Materials , vol.3578 , pp. 256-263
    • Strekalov, V.N.1
  • 40
    • 0041360157 scopus 로고    scopus 로고
    • Experimental study of wavelength dependent damage threshold in DKDP
    • G. Exarhos, A. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds, Proc. SPIE
    • C. W. Carr, H. B. Radousky, and S. G. Demos, "Experimental study of wavelength dependent damage threshold in DKDP," in Laser-Induced Damage in Optical Materials, G. Exarhos, A. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., Proc. SPIE 4932, 385-389 (2003).
    • (2003) Laser-Induced Damage in Optical Materials , vol.4932 , pp. 385-389
    • Carr, C.W.1    Radousky, H.B.2    Demos, S.G.3
  • 41
    • 0033171950 scopus 로고    scopus 로고
    • Relations between the laser induced damage to optical thin film and the material band-gap
    • Opto-Electron. Eng
    • D. Li, Z. Q. Zhu, X. Y. Fu, and F. M. Qiu, "Relations between the laser induced damage to optical thin film and the material band-gap," Opto-Electron. Eng. 26, 58-62 (1999).
    • (1999) , vol.26 , pp. 58-62
    • Li, D.1    Zhu, Z.Q.2    Fu, X.Y.3    Qiu, F.M.4
  • 43
    • 1942502866 scopus 로고    scopus 로고
    • Density related properties of metal oxide films
    • C. Amra and N. Kaiser, eds, Proc. SPIE
    • H. K. Pulker and S. Schlichtherle, "Density related properties of metal oxide films," in Advances in Optical Thin Films, C. Amra and N. Kaiser, eds., Proc. SPIE 5250, 1-11 (2004).
    • (2004) Advances in Optical Thin Films , vol.5250 , pp. 1-11
    • Pulker, H.K.1    Schlichtherle, S.2


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