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Volumn , Issue , 2006, Pages 663-664
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Reliability of sub 30NM BT(Body-Tied)-FinFET with HFSION/poly silicon gate stack for symmetric vth control
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Author keywords
[No Author keywords available]
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Indexed keywords
FERMI LEVEL PINNING;
SEGREGATION EFFECTS;
FERMI LEVEL;
HOT CARRIERS;
POLYSILICON;
RELIABILITY;
THRESHOLD VOLTAGE;
VOLTAGE CONTROL;
GATE DIELECTRICS;
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EID: 34250741911
PISSN: 15417026
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/RELPHY.2006.251313 Document Type: Conference Paper |
Times cited : (5)
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References (9)
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