Reliability qualification of CoSI2 electrical fuse for 90NM technology

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2006, Pages 392-397

  Tian, C ^a   Park, B ^a   Kothandaraman, C ^a   Safran, J ^a   Kim, D ^a   Robson, N ^a   Iyer, S S ^a  

^a IBM RESEARCH   (United States)

Author keywords

CoSi2 electrical fuse; Programming window; Reliability; Resistance stability

Indexed keywords

PROGRAMMING WINDOW; RESISTANCE STABILITY; UNPROGRAMMED FUSE ELEMENTS;

COBALT COMPOUNDS; ELECTRIC RESISTANCE MEASUREMENT; ELECTROMIGRATION; NANOTECHNOLOGY; RELIABILITY; THERMODYNAMIC STABILITY;

ELECTRIC FUSES;

EID: 34250739412     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2006.251234     Document Type: Conference Paper

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