Development of MEMS-based piezoelectric microvalve technologies

Sensors and Materials

Volumn 19, Issue 1, 2007, Pages 1-18

  Yang, Eui Hyeok ^a,c   Lee, Choonsup ^a   Khodadadi, J M ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b AUBURN UNIVERSITY   (United States)

^c STEVENS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

CFD; Gas flow; Liquid flow; Liquid compatible; Low power consumption; Microfluidics; Microvalve; Modeling; Piezoelectric; Proportional flow control

Indexed keywords

EID: 34250616331     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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