Electrostatic liquid-metal capacitive shunt MEMS switch

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2006, Pages 263-266

  Chen, Chung Hao ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Liquid metal; MEMS; RF; Shunt switch

Indexed keywords

LIQUID METAL DROPLETS; LIQUID-METAL CONTACT; OPEN CIRCUITS;

CAPACITANCE; COPLANAR WAVEGUIDES; ELECTRIC CONTACTS; ELECTRIC SWITCHES; ELECTROSTATIC DEVICES; LIQUID METALS;

MEMS;

EID: 34250373751     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2006.249483     Document Type: Conference Paper

References (9)

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