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Volumn , Issue , 2002, Pages 52-55
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Controlling the adhesion force for electrostatic actuation of microscale mercury drop by physical surface modification
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION;
CHEMICAL MODIFICATION;
CONTACT ANGLE;
DROP FORMATION;
ELECTRIC BREAKDOWN;
ELECTRIC CONTACTS;
LIQUID METALS;
MERCURY (METAL);
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
MICROSTRUCTURE;
SURFACE TREATMENT;
ACTUATION VOLTAGE;
ADHESION FORCE;
ELECTROSTATIC ACTUATION;
LIQUID-SOLID CONTACT;
MECHANICAL ANALYSIS;
MERCURY MICROSWITCHING;
MICROSCALE MERCURY DROP;
MICROSWITCH SYSTEM;
PHYSICAL SURFACE MODIFICATION;
MICROACTUATORS;
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EID: 0036195551
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (17)
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References (9)
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