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Volumn 68, Issue 5-6, 2007, Pages 835-840

On RF magnetron-sputtering preparation of Ag-Sb-S thin films

Author keywords

A. Chalcogenides; A. Thin films; B. Plasma deposition; D. Optical properties; D. Phase transitions

Indexed keywords

ENERGY DISPERSIVE X RAY ANALYSIS; MAGNETRON SPUTTERING; OPTICAL DATA STORAGE; OPTICAL PROPERTIES; OPTICAL RECORDING; PHASE TRANSITIONS; PLASMA DEPOSITION; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION;

EID: 34250360332     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpcs.2007.03.030     Document Type: Article
Times cited : (18)

References (11)
  • 8
    • 34250369204 scopus 로고    scopus 로고
    • JCPDS PDF-2 database, International Centre for Diffraction Data, Newtown Square, PA, USA release 54, 2004.
  • 10
    • 0004077682 scopus 로고    scopus 로고
    • Forschungscentrum Julich, Institute for Plasma Physics, Germany
    • Mayer M. SIMNRA, User's Guide (1998), Forschungscentrum Julich, Institute for Plasma Physics, Germany
    • (1998) SIMNRA, User's Guide
    • Mayer, M.1
  • 11
    • 33751040924 scopus 로고    scopus 로고
    • J. Gutwirth, T. Wágner, Mil. Vlček, Č. Drašar, L. Beneš, M. Hrdlička, M. Frumar, J. Schwarz, H. Tichá, in: Chalcogenide Alloys for Reconfigurable Electronics, A.H. Edwards, P.C. Taylor, J. Maimon, A. Kolobov (Eds.), Mater. Res. Soc. Symp. Proc. 918 (2006) Warrendalle, PA, 0918-H07-01-G08-01.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.