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Volumn 4085, Issue , 2001, Pages 125-128

Effects of sputtering parameters on the optical properties of AgInSbTe phase-change film

Author keywords

Absorptivity; AgInSbTe phase change films; Reflectivity; RF magnetron sputtering

Indexed keywords

ANNEALING; LASER BEAMS; LIGHT ABSORPTION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OPTICAL RESOLVING POWER; REFLECTION; SILVER ALLOYS; SPECTROPHOTOMETERS; THIN FILMS;

EID: 0035047132     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.416824     Document Type: Conference Paper
Times cited : (29)

References (6)
  • 4
    • 0027699258 scopus 로고
    • High-density pulse width modulation recording and rewritable capability in GeSbTe phase-change system using visible laser beam at low velocity
    • (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 5354
    • Uchino, K.1    Takada, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.