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Volumn 4085, Issue , 2001, Pages 125-128
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Effects of sputtering parameters on the optical properties of AgInSbTe phase-change film
a a a a a |
Author keywords
Absorptivity; AgInSbTe phase change films; Reflectivity; RF magnetron sputtering
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Indexed keywords
ANNEALING;
LASER BEAMS;
LIGHT ABSORPTION;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
OPTICAL RESOLVING POWER;
REFLECTION;
SILVER ALLOYS;
SPECTROPHOTOMETERS;
THIN FILMS;
PHASE CHANGE FILMS;
RADIO FREQUENCY MAGNETRON SPUTTERING;
SPUTTERING GAS PRESSURE;
OPTICAL DISK STORAGE;
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EID: 0035047132
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.416824 Document Type: Conference Paper |
Times cited : (29)
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References (6)
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