Porous silicon gettering

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 1996, Pages 461-464

  Tsuo, Y S ^a   Menna, P ^a   Pitts, J R ^a   Jantzen, K R ^a   Asher, S E ^a   Al Jassim, M M ^a   Ciszek, T F ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COSTS; CRYSTAL IMPURITIES; DIFFUSION; ETCHING; FILM GROWTH; OXIDATION; PHOTONS; SUBSTRATES; SURFACES; THIN FILMS;

EPITAXIAL SUBSTRATE; POLYCRYSTALLINE SILICON THIN FILM GROWTH; POROUS SILICON GETTERING;

SILICON WAFERS;

EID: 0030418641     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/pvsc.1996.564043     Document Type: Conference Paper

References (15)