Non-Contact and In-Process Measurement of Film Coating Thickness by Combining Two Principles of Eddy-Current and Capacitance Sensing

CIRP Annals - Manufacturing Technology

Volumn 56, Issue 1, 2007, Pages 509-512

  Kim, T O ^a   Kim, H Y ^b   Kim, C M ^b   Ahn, J H ^b  

^a Site Planning Co   (South Korea)

^b Pusan National University   (South Korea)

Author keywords

Capacitance; Coating thickness measurement; Eddy current

Indexed keywords

CAPACITANCE; COATINGS; DIELECTRIC MATERIALS; MATHEMATICAL MODELS; THIN FILMS;

BASE METAL; CAPACITANCE SENSING; EDDY-CURRENT SENSING; IN-PROCESS MEASUREMENT;

THICKNESS MEASUREMENT;

EID: 34250223111     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2007.05.121     Document Type: Article

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