Highly accurate measurement of sheet thickness: The planar error correction

IEEE Transactions on Applied Superconductivity

Volumn 14, Issue 2, 2004, Pages 1810-1813

  Tojo, F ^a   Hirakawa, S ^b   Toyoda, T ^b   Yamagata, K ^a   Omura, A ^a   Maeji, Y ^a   Itoh, M ^a  

^a KINKI UNIVERSITY   (Japan)

^b Yamabun Electronics Co Ltd   (Japan)

Author keywords

Magnetic sensor; Optical sensor; Thickness measure; Two dimensional error map

Indexed keywords

ATTENUATION; ERROR CORRECTION; MIRRORS; MULTILAYERS; OPTICAL SENSORS; OPTICAL SYSTEMS; PLASTIC SHEETS; SYNCHRONIZATION; THICKNESS MEASUREMENT;

INFRARED RAY METHODS; MAGNETIC SENSORS; POLYGONAL MIRRORS; TWO-DIMENSIONAL ERROR MAP;

POLYMERS;

EID: 4344654929     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2004.830868     Document Type: Conference Paper

References (6)

1. F. Tojo, S. Hirakawa, T. Toyoda, K. Yamagata, and M. Itoh, "Accurate measurement of film thickness (1),'' in Extended Abstracts (The 63rd Autumn Meeting, 2002), The Japan Society of Applied Physics, p. 128.
2. F. Tojo, Japan Plastics, vol. 53. no. 7, pp. 23-28, 2002.
3. J. W. Dally, W. F. Riley, and K. G. Mcconnel, Instrumention for Engineering Measurements, 2nd ed. NY, USA: John Willey and Sons, Inc., 1993, pp. 137-138.
4. Mitutoyo Corp, Laser Scan Micrometer Technical Manual Kawasaki, Japan, 1991.
5. F. Tojo, S. Hirakawa, T. Toyoda, K. Yamagata, and M. Itoh. "Accurate measurement of film thickness (2)," in Extended Abstracts (The 50th Spring Meating, 2003), The Japan Society of Applied Physics, p. 200.
6. Japan Stainless Steel Association, Handbook for Stainless Steel, 3rd ed. Tokyo, Japan, 1995, pp. 5-6.