On the mechanism of gray scale patterning of Ag-containing As2S3 thin films

Journal of Physics and Chemistry of Solids

Volumn 68, Issue 5-6, 2007, Pages 920-925

  Kovalskiy, A ^a   Jain, H ^a   Neilson, J ^a   Vlcek, M ^b   Waits, C M ^c   Churaman, W ^c   Dubey, M ^c  

^a Lehigh University   (United States)

^b UNIVERSITY OF PARDUBICE   (Czech Republic)

^c U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

A. Amorphous materials; A. Thin films; C. Photoelectron spectroscopy; D. Diffusion; D. Microstructure

Indexed keywords

ANNEALING; CHALCOGENIDES; DIFFUSION; LITHOGRAPHY; PHOTORESISTS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILVER; X RAY PHOTOELECTRON SPECTROSCOPY;

GRAY SCALE PATTERNING; SILVER DIFFUSION; THERMAL ANNEALING;

THIN FILMS;

EID: 34250203241     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpcs.2007.01.001     Document Type: Article

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