Kinetic approach to gas flows in microchannels

Nanoscale and Microscale Thermophysical Engineering

Volumn 11, Issue 1-2, 2007, Pages 211-226

  Lorenzani, S ^a   Gibelli, L ^a   Frezzotti, A ^a   Frangi, A ^a   Cercignani, C ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

BGK Hodel; Boltzmann equation; Damping forces; MEMS

Indexed keywords

ACCELEROMETERS; BOLTZMANN EQUATION; DAMPING; MICROCHANNELS; NUMERICAL METHODS; REYNOLDS EQUATION;

MICROMECHANICAL STRUCTURES; SILICON BIAXIAL ACCELEROMETERS; TRANSITIONAL FLOW;

FLOW OF GASES;

EID: 34250185682     PISSN: 15567265     EISSN: None     Source Type: Journal    
DOI: 10.1080/15567260701333489     Document Type: Article

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