Selective wet-etching of amorphous/crystallized Ag-As-S and Ag-As-S-Se chalcogenide thin films

Journal of Physics and Chemistry of Solids

Volumn 68, Issue 5-6, 2007, Pages 1008-1013

  Orava, J ^a   Wagner, T ^a   Krbal, M ^a   Kohoutek, T ^a   Vlcek, Mil ^a   Benes, L ^a   Kotulanova, E ^b   Bezdicka, P ^b   Klapetek, P ^c   Frumar, M ^a  

^a UNIVERSITY OF PARDUBICE   (Czech Republic)

^b INSTITUTE OF INORGANIC CHEMISTRY   (Czech Republic)

^c CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

A. Amorphous materials; A. Chalcogenides; A. Quasicrystals; A. Thin films; D. Surface properties

Indexed keywords

AMORPHOUS MATERIALS; CHALCOGENIDES; QUASICRYSTALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; SURFACE ROUGHNESS; WET ETCHING;

OPTICAL ELEMENTS FABRICATION; SELECTIVE ETCHING;

THIN FILMS;

EID: 34250179147     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpcs.2007.03.056     Document Type: Article

References (23)

1. Frumar M., Frumarova B., Wagner T., and Nemec P. In: Kolobov A.V. (Ed). Photo-Induced Metastability in Amorphous Semiconductors (2003), Wiley-VCHM GmbH & Co. KGaA 23
2. Tanaka K. In: Kolobov A.V. (Ed). Photo-Induced Metastability in Amorphous Semiconductors (2003), Wiley-VCHM GmbH & Co. KGaA 69
3. D. Tsiulyanu, in: Non-Crystalline Materials for Optoelectronics, Series: Optoelectronic Materials and Devices, vol. 1, INOE Publishing House, 2004. p. 297.
4. Orava J., Wagner T., Krbal M., Kohoutek T., Vlcek Mil., and Frumar M. J. Non-Cryst. Solids 352 (2006) 1637
5. Teteris J. J. Non-Cryst. Solids 299-302 (2002) 978
6. Frumar M., Cvrkal M., Vlcek M., and Wagner T. J. Non-Cryst. Solids 164-166 (1993) 1243
7. Eisenberg N.P., Manevich M., Arsh A., Klebanov M., and Lyubin V. J. Opt. Adv. Mater. 4 (2002) 405
8. Mitkova M., and Boncheva-Mladenova Z. J. Non-Cryst. Solids 90 (1987) 589
9. Klabec R., Thomas A., Kluge G., Beyer W., Grotzschei R., and Zuptitz P. Phys. Status Solidi (a) 106 (1983) 491
10. Y. Anzai, T. Shintani, H. Minemura, H. Miyamoto, J. Ushiyama, in: M. Wuttig (Ed.), Proceedings of the Conference EPCOS, Balzers, Liechtenstein, 2004.
11. Yoshida N., and Tanaka K. J. Non-Cryst. Solids 227-230 (1998) 779
12. Gutwirth J., Wagner T., Bezdicka P., Vlcek Mil., and Frumar M. Phys. Chem. Glasses Eur. J. Glasss Sci. Technol. B 47 2 (2006) 229
13. Lee H.-Y., and Yao T. J. Vac. Sci. Technol. B 20 5 (2002) 2017
14. Wagner T., Kasap S.O., Vlcek Mir., Frumar M., Nesladek P., and Vlcek Mil. Appl. Surf. Sci. 175 (2001) 117
15. Krbal M., Wagner T., Vlcek Mil., Vlcek Mir., and Frumar M. J. Non-Cryst. Solids 352 (2006) 2662
16. Makreski P., Jovanoski G., Minceva-Sukarova B., Soptrajanov B., Green A., Engelen B., and Gretic I. Vibrat. Spectrosc. 35 (2004) 59
17. Ogusu K., Kumagai T., Fujimori Y., and Kitao M. J. Non-Cryst. Solids 324 (2003) 118
18. Minceva-Sukarova B., Jovanovski G., Makreski P., Soptrajanov B., Griffith W., Willis R., and Grzetic I. J. Mol. Struct. 651-653 (2003) 181
19. Frumar M., and Wagner T. Curr. Opin. Solid State Mater. Sci. 7 (2003) 117
20. Fritzsche H. In: Popescu M. (Ed). Homage Book-Adnrei Andriesh (1999), INOE and INFM Publishing House, Bucharest 53
21. Okuno M., Sugaya H., and Matsumoto T. J. Non-Cryst. Solids 150 (1992) 356
22. Flavell W.R. In: Vickermann J.C. (Ed). Surface Analysis-The Principal Techniques (1998), Wiley, New York 346
23. Shkol'nikov E.V., D'yachenko Yu.I., and Shkol'nikova A.M. Zh. Prikl. Khim. 67 (1994) 1401