Investigation of the effects of air on the dynamic behavior of a small cantilever beam

Journal of Sound and Vibration

Volumn 305, Issue 1-2, 2007, Pages 243-260

  Nouira, H ^a   Foltete E ^a   Hirsinger, L ^a   Ballandras, S ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DYNAMIC RESPONSE; FREQUENCY DOMAIN ANALYSIS; LITHIUM COMPOUNDS; MICROSYSTEMS; SINGLE CRYSTALS; STRUCTURAL DESIGN;

ENERGY CONVERTERS; LASER VIBROMETERS; LITHIUM NIOBATES; VACUUM CHAMBERS;

CANTILEVER BEAMS;

EID: 34250024917     PISSN: 0022460X     EISSN: 10958568     Source Type: Journal    
DOI: 10.1016/j.jsv.2007.04.013     Document Type: Article

References (33)

1. Avallone E.A. Standard Handbook for Mechanical Engineers (1987), McGraw-Hill, New York
2. Jimbo Y., and Ito K. Energy loss of a cantilever vibrator. Journal of the Horological Institute of Japan 47 (1968) 1-15
3. Teresawa T., Kawamura Y., Sato K., and Tanaka S. Pressure dependent dynamic characteristics of miniature silicon oscillator. Bulletin of the Japan Society for Precision Engineering 22 (1988) 49-54
4. Blom F.R., Bouwstra S., Elwenspoek M., and Fluitman J.H.J. Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science and Technology B 10 (1992) 19-26
5. Zang L., Cho D., Shiraishi H., and Timmer W. Squeeze film damping in microelectromechanical systems. Proceeding of the ASME Winter Annual Meeting, Dynamic Systems, Measurement and Control 40 (1992) 149-160
6. J.B. Starr, Squeeze-film damping in solid-state accelerometers, IEEE Solid-State Sensors an Actuators Workshop, Hilton Head Island, SC, USA, 1990, pp. 44-47.
7. Cho Y., Pisano A.P., and Howe R.T. Viscous damping model for laterally oscillating microstructures. Journal of Microelectromechanical Systems 3 (1994) 81-87
8. Hosaka H., Itao K., and Kuroda S. Damping characteristics of beam-shaped micro-oscillators. Sensors and Actuators A 49 (1995) 87-95
9. Hosaka H., and Uenishi Y. Static rigidity and natural frequency of flat permalloy springs used in electromagnetic microactuators. The Japan Society for precision Engineering 27 (1993) 253-258
10. Hutcherson S., and Ye W. On the squeeze-film damping of micro-resonators in the free-molecule regime. Journal of Micromechanics and Microengineering 14 (2004) 1726-1733
11. Andrews M.K., Harris P.D., and Tuner G.C. A comparison of squeeze film theory with measurements of a microstructure. Sensors and Actuators A 36 (1993) 79-87
12. Zooh J.D., Burns D.W., Guckel H., Sniegowski J.J., Englstad R.L., and Feng Z. Characteristic of polysilicon resonant microbeams. Sensors and Actuator A 35 (1992) 51-59
13. Andrews M.K., and Harris P.D. Damping and viscosity measurements using a microstructure. Sensors and Actuators A 49 (1995) 103-108
14. Kumar P., and Foufoula-Georgiou E. Wavelet analysis for geophysical applications. Reviews of Geophysics 35 (1997) 385-412
15. Mallat S. Une exploitation des signaux en ondelettes (2000), Editions de l'Ecole Polytechnique, Paris
16. Ruzzene M., Fasana A., Garibaldi L., and Piombo B. Natural frequencies and dampings identification using wavelet transform: application to real data. Mechanical Systems and Signal Processing 11 (1997) 207-218
17. Slavic J., Simonovski I., and Boltezar M. Damping identification using a continuous wavelet transform: application to real data. Journal of Sound and Vibration 262 (2003) 291-307
18. Lardies J., and Gouttebroze S. Identification of modal parameters using the wavelet transform. International Journal of Mechanical Sciences 44 (2002) 2263-2283
19. Lardies J., Ta M.N., and Berthillier M. Modal parameter estimation based on the wavelet transform of output data. Archive of Applied Mechanics 73 (2004) 718-733
20. L. Heller, Amortissement Dans les Structures Assemblées, PhD Thesis, University of Franche-Comté, France, 2005.
21. Martarelli M., Revel G.M., and Santolini C. Automated modal analysis by scanning laser vibrometry: problem and uncertainties associated with the scanning system calibration. Mechanical Systems and Signal Processing 15 (2001) 581-601
22. H. Nouira, L. Heller, E. Foltête, L. Hirsinger, Influence of air pressure on the micro-beam dynamics, International Modal Analysis Conference, St. Louis Missouri, USA, February 2006.
23. Ta M.N., and Lardies J. Identification of weak non-linearities on damping and stiffness by the continuous wavelet transform. Journal of Sound and Vibration 293 (2006) 16-37
24. Osinski Z. Damping of Vibrations (1998), A.A. Balkema, Rotterdam, Netherlands
25. Panteliou S.D., Chondros T.G., and Argyrakis V.C. Damping factor as an indicator of crack severity. Journal of Sound and Vibration 241 (1999) 235-245
26. Srikar V.T., and Senturia S.D. Thermoelastic damping in fine-grained polysilicon flexural beam resonators. Journal of Microelectromechanical Systems 11 (2002) 499-504
27. A.N. Norris, D.M. Photiadis, Thermoelastic relaxation in elastic structures, with applications to thin plates, Report, Mechanical and Aerospace Engineering, Naval Research Laboratory, USA, 2004.
28. Lifshitz R., and Roukes M.L. Thermoelastic damping in micro- and nanomechanical systems. Physical Review B 61 (2000) 5600-5609
29. Kino G.S. Acoustic Waves: Devices, Imaging, and Analog Signal Processing (1987), Prentice-Hall, New Jersey
30. Toufine A., Barrau J.J., and Berthillier M. Dynamic study of a structure with flexion-torsion coupling in the presence of dry friction. Non-linear Dynamics 18 (1999) 321-337
31. Goodman L.E., and Klumpp J.H. Analysis of slip damping with reference to turbine-blade vibration. Journal of Applied Mechanics (1956) 421-429
32. Schatzman M., Lamarque C.H., and Bastien J. An ill-posed mechanical problem with friction. European Journal of Mechanics-A/Solids 18 (1999) 415-420
33. Kokubum K., Hiata M., Murakami H., Toda Y., and Ono M. A bending and stretching mode crystal oscillator as a friction vacuum gauge. Vacuum 34 (1984) 731-735