Ablation lithography for TFT-LCD

Materials Research Society Symposium Proceedings

Volumn 685, Issue , 2001, Pages 1-10

  Suzuki, Kenkichi ^a   Hayashi, Nobuaki ^a   Masuhara, Hiroshi ^b   Lippert, Thomas K ^c  

^a HITACHI LTD   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COST ACCOUNTING; LASER ABLATION; LIQUID CRYSTAL DISPLAYS; PHOTOLITHOGRAPHY; THROUGHPUT;

ABLATION LITHOGRAPHY; MANUFACTURING COST; THROUGHPUT TIME;

THIN FILM TRANSISTORS;

EID: 34249873520     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-685-d1.2.1     Document Type: Conference Paper

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