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Volumn 91, Issue 13, 2007, Pages 1253-1257

Amorphous silicon films with high deposition rate prepared using argon and hydrogen diluted silane for stable solar cells

Author keywords

Amorphous silicon; Argon dilution; Deposition rate; Stability; Staebler Wronski effect

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ARGON; DEPOSITION RATES; DILUTION; ETCHING; HYDROGEN; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY; STABILITY; X RAY DIFFRACTION;

EID: 34249785926     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2007.03.004     Document Type: Article
Times cited : (17)

References (17)
  • 9
    • 2942534382 scopus 로고    scopus 로고
    • (and references therein)
    • Matsuda A. J. Non-Cryst. Solids 338-340 (2004) 1 (and references therein)
    • (2004) J. Non-Cryst. Solids , vol.338-340 , pp. 1
    • Matsuda, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.