Development of a new high-stability transfer standard based on resonant silicon gauges for the range 100 Pa to 130 kPa

Metrologia

Volumn 44, Issue 3, 2007, Pages 171-176

  Hendricks, J H ^a   Miiller, A P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CALIBRATION; GAGES; SILICON;

DIFFERENTIAL PRESSURE STANDARDS; RESONANT SILICON GAUGES;

STANDARDS;

EID: 34249734755     PISSN: 00261394     EISSN: 16817575     Source Type: Journal    
DOI: 10.1088/0026-1394/44/3/002     Document Type: Article

References (14)

1. Miiller A P, Bergoglio M, Bignell N, Fen K M K, Hong S S, Jousten K, Mohan P, Redgrave F J and Sardi M 2002 Metrologia 39 (Tech. Suppl.) 07001
2. Miiller A P, Cignolo G, Fitzgerald M P and Perkin M P 2002 Metrologia 39 (Tech. Suppl.) 07002
3. Heydemann P L, Tilford C R and Hyland R W 1977 J. Vac. Sci. Technol. 14 597-605
4. Tilford C R 1977 Appl. Opt. 16 1857-60
5. Tilford C R 1987 Metrologia 24 121-31
6. Tilford C R, Miiller A P and Lu S 1998 Proc. NCSL Workshop and Symp., National Conf. Standards Laboratories (Boulder, CO, USA) pp 245-56
7. Miiller A P, Tilford C R and Hendricks J H 2005 Metrologia 42 S187-92
8. Schmidt J W, Jain K, Miiller A P, Bowers W J and Olson D A 2006 Metrologia 43 53-9
9. Harada K, Ikeda K, Kuwayama H and Murayama H 1999 Sensors Actuators 73 261-6
10. Miiller A P 1999 Metrologia 36 617-21
11. Youden W J 1959 Indust. Qual. Control 15 24-8
12. Poulter K F, Rodgers M J, Nash P J, Thompson T J and Perkin M P 1983 Vacuum 33 311-6
13. Takaishi T and Sensui Y 1963 Trans. Faraday Soc. 59 2503-14
14. Taylor B N and Kuyatt C E 1994 Guidelines for evaluating and expressing the uncertainty of NIST measurement results NIST Technical Note 1297 pp 1-20