Measurement performance of high-accuracy low-pressure transducers

Metrologia

Volumn 36, Issue 6, 1999, Pages 617-621

  Miiller, A P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE DIAPHRAGM GAUGES; PIEZORESISTIVE SILICON GAUGES; QUARTZ BOURDON GAUGES; QUARTZ RESONANT GAUGES; RESONANT SILICON GAUGES;

CALIBRATION; DIAPHRAGMS; MICROELECTROMECHANICAL DEVICES; PRESSURE GAGES; SENSORS; SILICON;

PRESSURE TRANSDUCERS;

EID: 0033295935     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/36/6/26     Document Type: Article

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