SCOPUS 정보 검색 플랫폼

Key Engineering Materials

Volumn 291-292, Issue , 2005, Pages 401-406

Nano mechanical processing of silicon by atomic force microscopy

(3) Miyake, S a Wang, M a Kim, J a

a NIPPON INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

AFM; Diamond tip; Mechanochemical processing; Nanoprocessing; Protuberance processing; Silicon

Indexed keywords

DIAMONDS; ETCHING; POTASSIUM HYDROXIDE; SILICON;

DIAMOND TIP; INDENTATION MEASUREMENTS; MECHANICAL PROCESSING; MECHANO-CHEMICAL PROCESSING; NANO-METER SCALE; NANOPROCESSING; POTASSIUM HYDROXIDE SOLUTION; SILICON SURFACES;

ATOMIC FORCE MICROSCOPY;

EID: 34249320127 PISSN: 10139826 EISSN: 16629795 Source Type: Book Series
DOI: 10.4028/www.scientific.net/KEM.291-292.401 Document Type: Conference Paper

Times cited : (5)

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