Length effect on formation of metallic patterns by nanoimprinting process - Molecular dynamics simulation

Materials Science Forum

Volumn 505-507, Issue PART 1, 2006, Pages 133-138

  Cheng, Ming Chieh ^a   Hsueh, Yun Liang ^a   Chen, Hsung Yu ^a   Sung, Cheng Kuo ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Formation; Length effect; Molecular dynamics simulation; Nanoimprinting

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; GOLD COMPOUNDS; NICKEL COMPOUNDS; SINGLE CRYSTALS; THIN FILMS;

FACE CENTRAL CUBICAL (FCC); LENGTH EFFECT; MOLECULAR DYNAMICS SIMULATION; NANOIMPRINTING;

MOLECULAR DYNAMICS;

EID: 34249307446     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-990-3.133     Document Type: Conference Paper

References (17)

1. Younan Xia and George M. Wihtesides: Angew. Chem. Int. Ed., 37, 550-575 (1998)
2. Stephen Y. Chou, Peter R. Krauss, and Preston J. Renstrom: J. Vac. Sci. Technol. B 14, 6 (1996)
3. Stephen Y. Chuo, Peter R. Krauss, Wei Zhang, Lingjie Guo, and Lei Zhuang: J. Vac. Sci. Technol. B 15, 6 (1997)
4. Te-Hua Fang and Cheng-I Weng: Nanotechnology Vol. 11, p. 148 (2000)
5. Te-Hua Fang, Cheng-I Weng and Jee-Gong Chang: Nanotechnology Vol. 11, p. 181 (2000)
6. U. Landman, W. D. Luedtke, and EM Ringer: Wear, Vol. 153, 3 (1992)
7. U. Landman, W. D. Luedtke, N. A. Brunham, and R. J. Colton: Science, Vol. 248, p. 454 (1990)
8. U. Landman and W. D. Luedtke: J. Vac. Sci. Technol. B, Vol. 9, 2, p. 414 (1991)
9. K. Maekawa and A. Itoh: Wear, Vol. 188, p. 115-122 (1995)
10. J. Shimizu, H. Eda, M. Yoritsune, and E. Ohmura: Nanotechnology, Vol. 9, p. 118 (1998)
11. J. M. Haile: Molecular Dynamics Simulation: Elementary Methods, Wiley, New York (1992)
12. L. A. Girifalco and V. G. Weizer: Pyhsical Review Vol. 114, 3 (1959)
13. R. Komanduri, N. Chandrasekaran, and L. M. Raff: Phys. Rev. B, Vol. 61, p. 14007 (2000)
14. B. Bhushan: Handbook of Micro/Nano Tribology, 2nd Ed., CRC Press, Boca Raton (1995)
15. U. Landman and W. D. Luedtke: J. Vac. Sci. Technol. B, Vol. 9, p. 414 (1991)
16. Yoonjoon Choi, Krystyn J. Van Vliet, Ju Li, and Subra Suresh: Journal of Applied Physics, Vol. 94, 9 (2003)
17. D. E. Kramer, A. A. Volinsky, N. R. Moody, and W. W. Gerberich: J. Mater. Res., Vol. 16, 11 (2001)