In situ ion scattering and x-ray photoelectron spectroscopy studies of stability and nanoscale oxidation of single crystal (100) InAs

Applied Physics Letters

Volumn 90, Issue 20, 2007, Pages

  Chang, Chia Lin ^a   Shutthanandan, Vaithiyalingam ^b   Singhal, Subhash C ^b   Ramanathan, Shriram ^a  

^a HARVARD UNIVERSITY   (United States)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN MOLECULAR CLEANING; ION CHANNELING; ION SCATTERING; KINETIC BOUNDARIES; NUCLEAR REACTION ANALYSIS;

INDIUM ARSENIDE; INTERFACES (MATERIALS); OXIDATION; SURFACE CLEANING; X RAY PHOTOELECTRON SPECTROSCOPY;

SINGLE CRYSTALS;

EID: 34249100015     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2740200     Document Type: Article

References (11)

1. H. J. Haugan, K. Mahalingam, G. J. Brown, W. C. Mitchel, B. Ullrich, L. Grazulis, S. Elhamris, J. C. Wicker, and D. W. Stokes, J. Appl. Phys. 100, 123110 (2006).
2. S. Maimon and G. W. Wicks, Appl. Phys. Lett. 89, 151109 (2006).
3. R. Chau, S. Datta, M. Doczy, B. Doyle, J. Jin, J. Kavalieros, A. Majumdar, M. Metz, and M. Radosavljevic, IEEE Trans. Nanotechnol. 4, 153 (2005).
4. M. J. Gilbert and D. K. Ferry, J. Appl. Phys. 99, 054503 (2006).
5. N. Bertru, Y. Bacquet, M. Nouaoura, and L. Lassabatere, Appl. Surf. Sci. 74, 331 (1994).
6. G. R. Bell, N. S. Kaijaks, R. J. Dixon, and C. F. McConville, Surf. Sci. 401, 125 (1998).
7. O. E. Tereshchenko, D. Paget, P. Chiaradia, J. E. Bonnet, F. Wiame, and A. Taleb-lbrahimi, Appl. Phys. Lett. 82, 4280 (2003).
8. G. P. Schwartz, W. A. Sunder, J. E. Griffiths, and G. J. Gualtieri, Thin Solid Films 94, 205 (1982).
9. G. P. Schwartz, J. E. Griffiths, and G. J. Gualtieri, Thin Solid Films 94, 213 (1982).
10. G. P. Schwartz, Thin Solid Films 103, 3 (1983).
11. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Physical Electrons, Eden Prairie, MN, 1995), p. 98.