Fabrication of a microlens array electroformed mold with low roughness and high hardness

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 419-425

  Lin, Tsung Hung ^a   Hung, Shih Yu ^b   Yang, Hsiharng ^c   Chao, Ching Kong ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NAN KAI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^c NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTROFORMING; GENETIC ALGORITHMS; MICROHARDNESS; MICROLENSES; NEURAL NETWORKS; PH EFFECTS; SURFACE ROUGHNESS;

ELECTROLYTE PARAMETERS; MICRO-MOLD HARDNESS; MICROLENS ARRAY FABRICATION;

MOLDS;

EID: 34249085647     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/001     Document Type: Article

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